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On the diffusion and activation of ion-implanted n-type dopants in germanium

dc.contributor.authorSimoen, Eddy
dc.contributor.authorVanhellemont, Jan
dc.date.accessioned2021-10-18T03:08:03Z
dc.date.available2021-10-18T03:08:03Z
dc.date.issued2009
dc.identifier.issn0021-8979
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16233
dc.sourceIIOimport
dc.titleOn the diffusion and activation of ion-implanted n-type dopants in germanium
dc.typeJournal article
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage103516
dc.source.journalJournal of Applied Physics
dc.source.issue10
dc.source.volume106
imec.availabilityPublished - open access


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