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On the diffusion and activation of ion-implanted n-type dopants in germanium
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On the diffusion and activation of ion-implanted n-type dopants in germanium
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Date
2009
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19785.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Simoen, Eddy
;
Vanhellemont, Jan
Journal
Journal of Applied Physics
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1812
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Acq. date: 2025-12-18
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Metrics
Views
1812
since deposited on 2021-10-18
3
last month
Acq. date: 2025-12-18
Citations