On the diffusion and activation of ion-implanted n-type dopants in germanium

dc.contributor.author	Simoen, Eddy
dc.contributor.author	Vanhellemont, Jan
dc.contributor.imecauthor	Simoen, Eddy
dc.contributor.orcidimec	Simoen, Eddy::0000-0002-5218-4046
dc.date.accessioned	2021-10-18T03:08:03Z
dc.date.available	2021-10-18T03:08:03Z
dc.date.embargo	9999-12-31
dc.date.issued	2009
dc.identifier.issn	0021-8979
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/16233
dc.source.beginpage	103516
dc.source.issue	10
dc.source.journal	Journal of Applied Physics
dc.source.volume	106
dc.title	On the diffusion and activation of ion-implanted n-type dopants in germanium
dc.type	Journal article
dspace.entity.type	Publication
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