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High-hole mobility silicon germaium on insulator substrates with high crystalline quality obtained by the germanium condensation technique
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Authors
Souriau, Laurent
;
Nguyen, Tuan
;
Augendre, Emmanuel
;
Loo, Roger
;
Terzieva, Valentina
;
Caymax, Matty
;
Cristoloveanu, Sorin
;
Meuris, Marc
;
Vandervorst, Wilfried
ISSN
0013-4651
Issue
3
Journal
Journal of the Electrochemical Society
Volume
156
Title
High-hole mobility silicon germaium on insulator substrates with high crystalline quality obtained by the germanium condensation technique
Publication type
Journal article
Embargo date
9999-12-31
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