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Micromachined thermoelectric energy harvester fabrication on 6-inch wafer and characterization

dc.contributor.authorSu, Jiale
dc.contributor.authorGoedbloed, Martijn
dc.contributor.authorvan Andel, Yvonne
dc.contributor.authorLeonov, Vladimir
dc.contributor.authorWang, Ziyang
dc.contributor.authorVullers, Ruud
dc.date.accessioned2021-10-18T03:25:47Z
dc.date.available2021-10-18T03:25:47Z
dc.date.issued2009-12
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16278
dc.sourceIIOimport
dc.titleMicromachined thermoelectric energy harvester fabrication on 6-inch wafer and characterization
dc.typeProceedings paper
dc.contributor.imecauthorLeonov, Vladimir
dc.contributor.orcidimecLeonov, Vladimir::0000-0002-4364-8945
dc.source.peerreviewno
dc.source.beginpage157
dc.source.endpage160
dc.source.conference9th PowerMEMS Workshop
dc.source.conferencedate1/12/2009
dc.source.conferencelocationWashington, D.C. USA
imec.availabilityPublished - imec


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