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Process development on large-topography microstructures for thermoelectric energy harvesters

dc.contributor.authorSu, Jiale
dc.contributor.authorVullers, Ruud
dc.contributor.authorGoedbloed, Martijn
dc.contributor.authorvan Andel, Yvonne
dc.contributor.authorLeonov, Vladimir
dc.contributor.authorWang, Ziyang
dc.date.accessioned2021-10-18T03:26:11Z
dc.date.available2021-10-18T03:26:11Z
dc.date.issued2009-03
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16279
dc.sourceIIOimport
dc.titleProcess development on large-topography microstructures for thermoelectric energy harvesters
dc.typeProceedings paper
dc.contributor.imecauthorLeonov, Vladimir
dc.contributor.orcidimecLeonov, Vladimir::0000-0002-4364-8945
dc.source.peerreviewno
dc.source.beginpage532
dc.source.endpage535
dc.source.conferenceSmart Systems Integration
dc.source.conferencedate10/03/2009
dc.source.conferencelocationBrussels Belgium
imec.availabilityPublished - imec


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