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Evaluation and screening of different wet cleaning solutions on BEOL applications

dc.contributor.authorSuhard, Samuel
dc.contributor.authorClaes, Martine
dc.contributor.authorLoh, James
dc.contributor.authorVereecke, Guy
dc.contributor.authorDemuynck, Steven
dc.contributor.authorVereecke, Bart
dc.contributor.authorBeyer, Gerald
dc.date.accessioned2021-10-18T03:27:03Z
dc.date.available2021-10-18T03:27:03Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16281
dc.sourceIIOimport
dc.titleEvaluation and screening of different wet cleaning solutions on BEOL applications
dc.typeMeeting abstract
dc.contributor.imecauthorSuhard, Samuel
dc.contributor.imecauthorClaes, Martine
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorVereecke, Bart
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage2070
dc.source.conference216th ECS Meeting
dc.source.conferencedate4/10/2009
dc.source.conferencelocationVienna Austria
imec.availabilityPublished - open access
imec.internalnotesMeeting Abstracts; Vol. MA2009-02


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