Show simple item record

Impact of LER on BEOL dielectric reliability: a quantitative model and experimental validation

dc.contributor.authorTokei, Zsolt
dc.contributor.authorRoussel, Philippe
dc.contributor.authorStucchi, Michele
dc.contributor.authorVersluijs, Janko
dc.contributor.authorCiofi, Ivan
dc.contributor.authorCarbonell, Laure
dc.contributor.authorBeyer, Gerald
dc.contributor.authorCockburn, Andrew
dc.contributor.authorAugustin, M.
dc.contributor.authorShah, Kavita
dc.date.accessioned2021-10-18T03:39:21Z
dc.date.available2021-10-18T03:39:21Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16313
dc.sourceIIOimport
dc.titleImpact of LER on BEOL dielectric reliability: a quantitative model and experimental validation
dc.typeProceedings paper
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorStucchi, Michele
dc.contributor.imecauthorVersluijs, Janko
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorCockburn, Andrew
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.source.peerreviewno
dc.source.beginpage228
dc.source.endpage230
dc.source.conferenceIEEE International Interconnect Technology Conference - IITC
dc.source.conferencedate1/06/2009
dc.source.conferencelocationSapporo, Hokkaido Japan
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record