Stability of silicon germanium stressors

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Authors
Tomasini, P; Machkaoutsan, Vladimir; Thomas, S. G.; Loo, Roger; Caymax, Matty; Verheyen, Peter
Conference
ICSI-6: 6th International Conference on Silicon Epitaxy and Heterostructures
Title
Stability of silicon germanium stressors
Publication type
Meeting abstract
Embargo date
9999-12-31
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