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Highly reliable micro-mirror arrays: succesful demonstrators of a SiGe above-IC MEMS process

dc.contributor.authorVan Bavel, Mieke
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-18T03:55:37Z
dc.date.available2021-10-18T03:55:37Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16352
dc.sourceIIOimport
dc.titleHighly reliable micro-mirror arrays: succesful demonstrators of a SiGe above-IC MEMS process
dc.typeJournal article
dc.contributor.imecauthorVan Bavel, Mieke
dc.contributor.imecauthorHaspeslagh, Luc
dc.source.peerreviewno
dc.source.journalSemiconductor Packaging News
dc.identifier.urlwww.semiconductorpackagingnews.com/articles/article_14202.shtml
imec.availabilityPublished - imec


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