Publication:
Highly reliable micro-mirror arrays: succesful demonstrators of a SiGe above-IC MEMS process
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1883 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-16
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Views
1883 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-16
Citations