Publication:
Highly reliable micro-mirror arrays: succesful demonstrators of a SiGe above-IC MEMS process
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1889 since deposited on 2021-10-18
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Acq. date: 2026-10-06
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Statistics
Views
1889 since deposited on 2021-10-18
3last month
3last week
Acq. date: 2026-10-06
Citations