FINFET doping: fabrication and metrology challenges

dc.contributor.author	Vandervorst, Wilfried
dc.date.accessioned	2021-10-18T04:23:59Z
dc.date.available	2021-10-18T04:23:59Z
dc.date.issued	2009
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/16421
dc.source	IIOimport
dc.title	FINFET doping: fabrication and metrology challenges
dc.type	Proceedings paper
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.date.embargo	9999-12-31
dc.source.peerreview	no
dc.source.conference	International Conference on Frontiers of Metrology and Characterization for Nanoelectronics
dc.source.conferencedate	11/05/2009
dc.source.conferencelocation	Albany, NY US
imec.availability	Published - open access
imec.internalnotes	invited paper