Metrology for nano-electronics: challenges and solutions

dc.contributor.author	Vandervorst, Wilfried
dc.date.accessioned	2021-10-18T04:24:42Z
dc.date.available	2021-10-18T04:24:42Z
dc.date.issued	2009
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/16423
dc.source	IIOimport
dc.title	Metrology for nano-electronics: challenges and solutions
dc.type	Meeting abstract
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.date.embargo	9999-12-31
dc.source.peerreview	no
dc.source.beginpage	1956
dc.source.conference	216th ECS Meeting
dc.source.conferencedate	4/10/2009
dc.source.conferencelocation	Vienna Oostenrijk
imec.availability	Published - open access
imec.internalnotes	Meeting Abstracts; Vol. MA2009-02