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Probing electrical properties of semiconductor structures on the nm-scale with SSRM

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorEyben, Pierre
dc.contributor.authorMody, Jay
dc.contributor.authorVanhaeren, Danielle
dc.contributor.authorSchulze, Andreas
dc.date.accessioned2021-10-18T04:25:08Z
dc.date.available2021-10-18T04:25:08Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16424
dc.sourceIIOimport
dc.titleProbing electrical properties of semiconductor structures on the nm-scale with SSRM
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVanhaeren, Danielle
dc.contributor.orcidimecVanhaeren, Danielle::0000-0001-8624-9533
dc.source.peerreviewno
dc.source.conferenceInternational Workshop on Insight in Semiconductor Device Fabrication, Metrology and Modelling - INSIGHT
dc.source.conferencedate26/04/2009
dc.source.conferencelocationNapa, CA USA
imec.availabilityPublished - imec


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