Nanoscale analysis of planar and 3D-Si-structures
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | Eyben, Pierre | |
dc.contributor.author | Polspoel, Wouter | |
dc.contributor.author | Mody, Jay | |
dc.contributor.author | Gilbert, Matthieu | |
dc.contributor.author | Koelling, Sebastian | |
dc.date.accessioned | 2021-10-18T04:25:33Z | |
dc.date.available | 2021-10-18T04:25:33Z | |
dc.date.issued | 2009 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16425 | |
dc.source | IIOimport | |
dc.title | Nanoscale analysis of planar and 3D-Si-structures | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.imecauthor | Eyben, Pierre | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.conference | 16th Microscopy of Semiconducting Materials Conference - MSM XVI | |
dc.source.conferencedate | 17/03/2009 | |
dc.source.conferencelocation | Oxford UK | |
imec.availability | Published - open access |