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Mechanical properties of thin deep ultraviolet (DUV) photoresist films after ion implantation

dc.contributor.authorVanstreels, Kris
dc.contributor.authorGonzalez, Mario
dc.date.accessioned2021-10-18T04:33:56Z
dc.date.available2021-10-18T04:33:56Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16445
dc.sourceIIOimport
dc.titleMechanical properties of thin deep ultraviolet (DUV) photoresist films after ion implantation
dc.typeOral presentation
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorGonzalez, Mario
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.source.peerreviewno
dc.source.conferenceAgilent User Meeting
dc.source.conferencedate11/11/2009
dc.source.conferencelocationWaldbronn Germany
imec.availabilityPublished - imec


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