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Defect study of polycrystalline-silicon seed layers made by aluminum induced crystallization
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Authors
Venkatachalam, Srisaran
;
Van Gestel, Dries
;
Gordon, Ivan
Conference
Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2009
Title
Defect study of polycrystalline-silicon seed layers made by aluminum induced crystallization
Publication type
Proceedings paper
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