Publication:

The influence of grinding and cleaning on Deep Reactive Ion Etching

Date

2009
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Author(s)

Verdonck, Patrick  
;
Van Cauwenberghe, Marc  
;
Phommahaxay, Alain  
;
Jamieson, Geraldine  
;
Bogaerts, Lieve  
;
Cotrin Teixeira, Ricardo
;
Huyghebaert, Cedric  
;
Tutunjyan, Nina  
;
Bearda, Twan
;
Boullart, Werner  

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1884 since deposited on 2021-10-18
Acq. date: 2026-09-18

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1884 since deposited on 2021-10-18
Acq. date: 2026-09-18

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