The influence of grinding and cleaning on Deep Reactive Ion Etching

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Authors
Verdonck, Patrick; Van Cauwenberghe, Marc; Phommahaxay, Alain; Jamieson, Geraldine; Bogaerts, Lieve; Cotrin Teixeira, Ricardo; Huyghebaert, Cedric; Tutunjyan, Nina; Bearda, Twan; Boullart, Werner
Conference
2nd International PESM Workshop on Plasma Etch and Strip in Microelectronics - PESM
Title
The influence of grinding and cleaning on Deep Reactive Ion Etching
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Meeting abstract
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