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Lossless solvent-based extension implant strip

dc.contributor.authorVos, Rita
dc.contributor.authorMannaert, Geert
dc.contributor.authorHalder, Sandip
dc.contributor.authorWada, Masayuki
dc.contributor.authorSonnemans, Roger
dc.contributor.authorTsvetanova, Diana
dc.contributor.authorValckx, Nick
dc.contributor.authorVanstreels, Kris
dc.contributor.authorConard, Thierry
dc.contributor.authorMertens, Paul
dc.date.accessioned2021-10-18T05:02:06Z
dc.date.available2021-10-18T05:02:06Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16508
dc.sourceIIOimport
dc.titleLossless solvent-based extension implant strip
dc.typeProceedings paper
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorMannaert, Geert
dc.contributor.imecauthorHalder, Sandip
dc.contributor.imecauthorTsvetanova, Diana
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecHalder, Sandip::0000-0002-6314-2685
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage179
dc.source.endpage186
dc.source.conferenceCleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 11
dc.source.conferencedate4/10/2009
dc.source.conferencelocationVienna Austria
imec.availabilityPublished - open access
imec.internalnotesECS Transactions; Vol. 25, Issue 5


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