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Transition between amorphous and crystalline phases of SiC deposited on Si substrate using H3SiCH3

dc.contributor.authorWang, Lily
dc.contributor.authorDimitrijev, Sima
dc.contributor.authorHan, Jisheng
dc.contributor.authorIacopi, Francesca
dc.contributor.authorZou, Jin
dc.date.accessioned2021-10-18T05:07:57Z
dc.date.available2021-10-18T05:07:57Z
dc.date.issued2009
dc.identifier.issn0022-0248
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16521
dc.sourceIIOimport
dc.titleTransition between amorphous and crystalline phases of SiC deposited on Si substrate using H3SiCH3
dc.typeJournal article
dc.source.peerreviewyes
dc.source.beginpage4442
dc.source.endpage4446
dc.source.journalJournal of Crystal Growth
dc.source.issue19
dc.source.volume311
imec.availabilityPublished - imec


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