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Transition between amorphous and crystalline phases of SiC deposited on Si substrate using H3SiCH3
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Authors
Wang, Lily
;
Dimitrijev, Sima
;
Han, Jisheng
;
Iacopi, Francesca
;
Zou, Jin
ISSN
0022-0248
Issue
19
Journal
Journal of Crystal Growth
Volume
311
Title
Transition between amorphous and crystalline phases of SiC deposited on Si substrate using H3SiCH3
Publication type
Journal article
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