Publication:
Transition between amorphous and crystalline phases of SiC deposited on Si substrate using H3SiCH3
Date
| dc.contributor.author | Wang, Lily | |
| dc.contributor.author | Dimitrijev, Sima | |
| dc.contributor.author | Han, Jisheng | |
| dc.contributor.author | Iacopi, Francesca | |
| dc.contributor.author | Zou, Jin | |
| dc.date.accessioned | 2021-10-18T05:07:57Z | |
| dc.date.available | 2021-10-18T05:07:57Z | |
| dc.date.issued | 2009 | |
| dc.identifier.issn | 0022-0248 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16521 | |
| dc.source.beginpage | 4442 | |
| dc.source.endpage | 4446 | |
| dc.source.issue | 19 | |
| dc.source.journal | Journal of Crystal Growth | |
| dc.source.volume | 311 | |
| dc.title | Transition between amorphous and crystalline phases of SiC deposited on Si substrate using H3SiCH3 | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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