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Characterization and optimization of polycrystalline Si70%Ge30% for surface micromachined thermopiles in human body applications

dc.contributor.authorWang, Ziyang
dc.contributor.authorFiorini, Paolo
dc.contributor.authorLeonov, Vladimir
dc.contributor.authorVan Hoof, Chris
dc.date.accessioned2021-10-18T05:11:25Z
dc.date.available2021-10-18T05:11:25Z
dc.date.issued2009
dc.identifier.issn0960-1317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16529
dc.sourceIIOimport
dc.titleCharacterization and optimization of polycrystalline Si70%Ge30% for surface micromachined thermopiles in human body applications
dc.typeJournal article
dc.contributor.imecauthorLeonov, Vladimir
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.orcidimecLeonov, Vladimir::0000-0002-4364-8945
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage94011
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.issue9
dc.source.volume19
imec.availabilityPublished - open access


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