Authors

Wang, Ziyang; Fiorini, Paolo; Leonov, Vladimir; Van Hoof, Chris

ISSN

0960-1317

Issue

9

Journal

Journal of Micromechanics and Microengineering

Volume

19

Title

Characterization and optimization of polycrystalline Si70%Ge30% for surface micromachined thermopiles in human body applications

Publication type

Journal article

Embargo date

9999-12-31