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Characterization and optimization of polycrystalline Si70%Ge30% for surface micromachined thermopiles in human body applications
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Characterization and optimization of polycrystalline Si70%Ge30% for surface micromachined thermopiles in human body applications
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Date
2009
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Wang, Ziyang
;
Fiorini, Paolo
;
Leonov, Vladimir
;
Van Hoof, Chris
Journal
Journal of Micromechanics and Microengineering
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1881
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Acq. date: 2025-12-15
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Metrics
Views
1881
since deposited on 2021-10-18
1
last month
Acq. date: 2025-12-15
Citations