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CMOS-compatible surface-micromachined test structure for determination of thermal conductivity of thin film materials based on Seebeck effect

dc.contributor.authorWang, Ziyang
dc.contributor.authorFiorini, Paolo
dc.contributor.authorVan Hoof, Chris
dc.date.accessioned2021-10-18T05:11:49Z
dc.date.available2021-10-18T05:11:49Z
dc.date.issued2009-01
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16530
dc.sourceIIOimport
dc.titleCMOS-compatible surface-micromachined test structure for determination of thermal conductivity of thin film materials based on Seebeck effect
dc.typeProceedings paper
dc.contributor.imecauthorVan Hoof, Chris
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage623
dc.source.endpage626
dc.source.conference22nd IEEE International Conference on Micro Electro Mechanical Systems - MEMS
dc.source.conferencedate25/01/2009
dc.source.conferencelocationSorrento Italy
imec.availabilityPublished - open access


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