Show simple item record

Double-patterning-compliant split and design

dc.contributor.authorWiaux, Vincent
dc.date.accessioned2021-10-18T05:14:51Z
dc.date.available2021-10-18T05:14:51Z
dc.date.issued2009
dc.identifier.issn1818-2259
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16537
dc.sourceIIOimport
dc.titleDouble-patterning-compliant split and design
dc.typeJournal article
dc.contributor.imecauthorWiaux, Vincent
dc.identifier.doi10.1117/2.1200902.1430
dc.source.peerreviewno
dc.source.journalSPIE Newsroom
dc.identifier.urlhttp://spie.org/x33831.xml?highlight=x2402&ArticleID=x33831
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record