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Articles
Double-patterning-compliant split and design
Publication:
Double-patterning-compliant split and design
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Date
2009
Journal article
https://doi.org/10.1117/2.1200902.1430
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Wiaux, Vincent
Journal
SPIE Newsroom
Abstract
Description
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1836
since deposited on 2021-10-18
Acq. date: 2025-12-17
Citations
Metrics
Views
1836
since deposited on 2021-10-18
Acq. date: 2025-12-17
Citations