Publication:
Double-patterning-compliant split and design
| dc.contributor.author | Wiaux, Vincent | |
| dc.contributor.imecauthor | Wiaux, Vincent | |
| dc.date.accessioned | 2021-10-18T05:14:51Z | |
| dc.date.available | 2021-10-18T05:14:51Z | |
| dc.date.issued | 2009 | |
| dc.identifier.doi | 10.1117/2.1200902.1430 | |
| dc.identifier.issn | 1818-2259 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16537 | |
| dc.identifier.url | http://spie.org/x33831.xml?highlight=x2402&ArticleID=x33831 | |
| dc.source.journal | SPIE Newsroom | |
| dc.title | Double-patterning-compliant split and design | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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