dc.contributor.author | Wilson, Chris | |
dc.contributor.author | Croes, Kristof | |
dc.contributor.author | Van Cauwenberghe, Marc | |
dc.contributor.author | Tokei, Zsolt | |
dc.contributor.author | Beyer, Gerald | |
dc.contributor.author | Horsfall, Alton | |
dc.contributor.author | O'Neill, Anthony | |
dc.date.accessioned | 2021-10-18T05:18:27Z | |
dc.date.available | 2021-10-18T05:18:27Z | |
dc.date.issued | 2009 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16545 | |
dc.source | IIOimport | |
dc.title | A NEMS based sensor to monitor stress in deep sub-micron Cu/Low-$k$ interconnects | |
dc.type | Journal article | |
dc.contributor.imecauthor | Wilson, Chris | |
dc.contributor.imecauthor | Croes, Kristof | |
dc.contributor.imecauthor | Van Cauwenberghe, Marc | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.imecauthor | Beyer, Gerald | |
dc.contributor.orcidimec | Croes, Kristof::0000-0002-3955-0638 | |
dc.source.peerreview | no | |
dc.source.beginpage | 115018 | |
dc.source.journal | Semicond. Sci. Technol. | |
dc.source.issue | 11 | |
dc.source.volume | 24 | |
dc.identifier.url | http://stacks.iop.org/0268-1242/24/115018 | |
imec.availability | Published - imec | |