dc.contributor.author | Witvrouw, Ann | |
dc.contributor.author | Beyne, Eric | |
dc.contributor.author | Haspeslagh, Luc | |
dc.contributor.author | De Wolf, Ingrid | |
dc.date.accessioned | 2021-10-18T05:22:28Z | |
dc.date.available | 2021-10-18T05:22:28Z | |
dc.date.issued | 2009 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16554 | |
dc.source | IIOimport | |
dc.title | CMOS-integrated SiGe MEMS: application to micro-mirror arrays | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Beyne, Eric | |
dc.contributor.imecauthor | Haspeslagh, Luc | |
dc.contributor.imecauthor | De Wolf, Ingrid | |
dc.contributor.orcidimec | Beyne, Eric::0000-0002-3096-050X | |
dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 734 | |
dc.source.endpage | 739 | |
dc.source.conference | Transducers. 15th International Conference on Solid-State Sensors, Actuators and Microsystems | |
dc.source.conferencedate | 21/06/2009 | |
dc.source.conferencelocation | Denver, CO USA | |
imec.availability | Published - open access | |