Show simple item record

Turning innovative MEMS concepts into products using IMEC's CMORE platform

dc.contributor.authorWitvrouw, Ann
dc.contributor.authorCartuyvels, Rudi
dc.date.accessioned2021-10-18T05:22:50Z
dc.date.available2021-10-18T05:22:50Z
dc.date.issued2009-12
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16555
dc.sourceIIOimport
dc.titleTurning innovative MEMS concepts into products using IMEC's CMORE platform
dc.typeProceedings paper
dc.contributor.imecauthorCartuyvels, Rudi
dc.source.peerreviewno
dc.source.conferenceSEMI Technology Symposium - STS
dc.source.conferencedate2/12/2009
dc.source.conferencelocationTokyo Japan
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record