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Packaging of 11MPixel CMOS-integrated SiGe micro-mirror arrays

dc.contributor.authorWitvrouw, Ann
dc.contributor.authorTilmans, Harrie
dc.contributor.authorBogaerts, Lieve
dc.contributor.authorDe Moor, Piet
dc.contributor.authorBearda, Twan
dc.contributor.authorHalder, Sandip
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorSchlatmann, Bart
dc.contributor.authorvan Bommel, Mark
dc.contributor.authorde Nooijer, Christine
dc.contributor.authorLauria, John
dc.contributor.authorVanneer, Roel
dc.contributor.authorvan Drieenhuizen, Bert
dc.date.accessioned2021-10-18T05:23:46Z
dc.date.available2021-10-18T05:23:46Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16557
dc.sourceIIOimport
dc.titlePackaging of 11MPixel CMOS-integrated SiGe micro-mirror arrays
dc.typeProceedings paper
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorBogaerts, Lieve
dc.contributor.imecauthorDe Moor, Piet
dc.contributor.imecauthorHalder, Sandip
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorde Nooijer, Christine
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimecHalder, Sandip::0000-0002-6314-2685
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage136
dc.source.endpage139
dc.source.conference22nd International IEEE Conference on Micro Electro Mechanical Systems - MEMS
dc.source.conferencedate25/01/2009
dc.source.conferencelocationSorrento Italy
imec.availabilityPublished - open access


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