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Analyzing the collapse force of narrow lines measured by lateral force AFM using an analytical mechanical model
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Authors
Wostyn, Kurt
;
Kim, Tae-Gon
;
Mertens, Paul
;
Park, Jin-Goo
ISSN
1662-9779
Journal
Solid State Phenomena
Volume
145-146
Title
Analyzing the collapse force of narrow lines measured by lateral force AFM using an analytical mechanical model
Publication type
Journal article
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