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Analyzing the collapse force of narrow lines measured by lateral force AFM using an analytical mechanical model

dc.contributor.authorWostyn, Kurt
dc.contributor.authorKim, Tae-Gon
dc.contributor.authorMertens, Paul
dc.contributor.authorPark, Jin-Goo
dc.date.accessioned2021-10-18T05:25:04Z
dc.date.available2021-10-18T05:25:04Z
dc.date.issued2009
dc.identifier.issn1662-9779
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16560
dc.sourceIIOimport
dc.titleAnalyzing the collapse force of narrow lines measured by lateral force AFM using an analytical mechanical model
dc.typeJournal article
dc.contributor.imecauthorWostyn, Kurt
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecWostyn, Kurt::0000-0003-3995-0292
dc.source.peerreviewyes
dc.source.beginpage55
dc.source.endpage58
dc.source.journalSolid State Phenomena
dc.source.volume145-146
dc.identifier.urlwww.scientific.net
imec.availabilityPublished - imec
imec.internalnotesUCPSS IX (2008)


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