Comparison of lithographic performance between MoSi binary mask and MoSi attenuated PSM

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Authors

Yamana, Mitsuharu; Wada, Shingo; Nagatomo, Tatsuya; Tonooka, Yoji; Lamantia, Matthew; Philipsen, Vicky

Issue

9

Journal

BACUS Newsletter

Volume

25

Title

Comparison of lithographic performance between MoSi binary mask and MoSi attenuated PSM

Publication type

Journal article

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