Statistical analysis of the influence of thinning processes on the strength of silicon

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Authors
Yang, Yu; Cotrin Teixeira, Ricardo; Roussel, Philippe; Swinnen, Bart; Verlinden, Bert; De Wolf, Ingrid
Conference
Materials Technology for 3-D Integration
Title
Statistical analysis of the influence of thinning processes on the strength of silicon
Publication type
Proceedings paper
Embargo date
9999-12-31
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