Authors

You, Shuzhen; Van Huylenbroeck, Stefaan; Nguyen, Duy; Sibaja-Hernandez, Arturo; Venegas, Rafael; Van Wichelen, Koen; Decoutere, Stefaan; De Meyer, Kristin

Conference

Abstracts 6th International Conference on Silicon Epitaxy and Heterostructrues - ICSI-6

Title

Optimization of external poly base sheet resistance in 0.13um quasi self-aligned SiGe:C HBTs

Publication type

Meeting abstract

Embargo date

9999-12-31