Proximity bias swing: origin and characterization

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Authors
Zandbergen, Peter; Gehoel-van Ansem, Wendy; de Klerk, Jos; Vandenberghe, Geert; Linskens, Frank
Conference
Advances in Resist Technology and Processing XV
Title
Proximity bias swing: origin and characterization
Publication type
Proceedings paper
Embargo date
9999-12-31
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