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A novel test structure to study intrinsic reliability of barrier/low-k

dc.contributor.authorZhao, Larry
dc.contributor.authorTokei, Zsolt
dc.contributor.authorGianni, Giai Gischia
dc.contributor.authorPantouvaki, Marianna
dc.contributor.authorCroes, Kristof
dc.contributor.authorBeyer, Gerald
dc.date.accessioned2021-10-18T05:46:32Z
dc.date.available2021-10-18T05:46:32Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16608
dc.sourceIIOimport
dc.titleA novel test structure to study intrinsic reliability of barrier/low-k
dc.typeProceedings paper
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.source.peerreviewno
dc.source.beginpage848
dc.source.endpage850
dc.source.conference47th Annual IEEE International Reliability Physics Symposium - IRPS
dc.source.conferencedate26/04/2009
dc.source.conferencelocationMontreal Canada
imec.availabilityPublished - imec


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