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A new perspective of barrier material evaluation and process optimization

dc.contributor.authorZhao, Larry
dc.contributor.authorTokei, Zsolt
dc.contributor.authorGianni, Giai Gischia
dc.contributor.authorVolders, Henny
dc.contributor.authorBeyer, Gerald
dc.date.accessioned2021-10-18T05:46:58Z
dc.date.available2021-10-18T05:46:58Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16609
dc.sourceIIOimport
dc.titleA new perspective of barrier material evaluation and process optimization
dc.typeProceedings paper
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorVolders, Henny
dc.contributor.imecauthorBeyer, Gerald
dc.source.peerreviewno
dc.source.beginpage206
dc.source.endpage208
dc.source.conferenceIEEE International Interconnect Technology Conference - IITC
dc.source.conferencedate1/06/2009
dc.source.conferencelocationSapporo Japan
imec.availabilityPublished - imec


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