dc.contributor.author | Zhao, Larry | |
dc.contributor.author | Tokei, Zsolt | |
dc.contributor.author | Gianni, Giai Gischia | |
dc.contributor.author | Volders, Henny | |
dc.contributor.author | Beyer, Gerald | |
dc.date.accessioned | 2021-10-18T05:46:58Z | |
dc.date.available | 2021-10-18T05:46:58Z | |
dc.date.issued | 2009 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16609 | |
dc.source | IIOimport | |
dc.title | A new perspective of barrier material evaluation and process optimization | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.imecauthor | Volders, Henny | |
dc.contributor.imecauthor | Beyer, Gerald | |
dc.source.peerreview | no | |
dc.source.beginpage | 206 | |
dc.source.endpage | 208 | |
dc.source.conference | IEEE International Interconnect Technology Conference - IITC | |
dc.source.conferencedate | 1/06/2009 | |
dc.source.conferencelocation | Sapporo Japan | |
imec.availability | Published - imec | |