SEG and uniaxial strain influence on FinFET performance at low temperature

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Authors
Agopian, P.G.D.; Pacheco, V.H.; Martino, J.A.; Simoen, Eddy; Claeys, Cor
Conference
9th International Workshop on Low Temperature Electronics - WOLTE
Title
SEG and uniaxial strain influence on FinFET performance at low temperature
Publication type
Proceedings paper
Embargo date
9999-12-31
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