Reliability and retention of 1T-RAM cell capacitor less on UTBOX SOI substrates

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Authors
Aoulaiche, Marc; Collaert, Nadine; Simoen, Eddy; Mercha, Abdelkarim; De Wachter, Bart; Bourdelle, K.K.; Nguyen, B.-Y.; Boedt, F.; Delprat, D.; Jurczak, Gosia; Altimime, Laith
Conference
International SOI Conference
Title
Reliability and retention of 1T-RAM cell capacitor less on UTBOX SOI substrates
Publication type
Proceedings paper
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