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Comprehensive Rutherford backscattering and channeling study of ion-beam-synthesized ErSi1.7 layers

dc.contributor.authorWu, Ming Fang
dc.contributor.authorVantomme, Andre
dc.contributor.authorDe Wachter, Jo
dc.contributor.authorDegroote, S.
dc.contributor.authorPattyn, Hugo
dc.contributor.authorLangouche, G.
dc.contributor.authorBender, Hugo
dc.date.accessioned2021-09-29T15:54:52Z
dc.date.available2021-09-29T15:54:52Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1666
dc.sourceIIOimport
dc.titleComprehensive Rutherford backscattering and channeling study of ion-beam-synthesized ErSi1.7 layers
dc.typeJournal article
dc.contributor.imecauthorVantomme, Andre
dc.contributor.imecauthorPattyn, Hugo
dc.contributor.imecauthorBender, Hugo
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage6920
dc.source.endpage6925
dc.source.journalJournal of Applied Physics
dc.source.issue9
dc.source.volume79
imec.availabilityPublished - open access


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