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Mechanism of photochemical reactions and photophysical processes during UV curing of organosilicate films with low dielectric constant

dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-18T15:17:41Z
dc.date.available2021-10-18T15:17:41Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16699
dc.sourceIIOimport
dc.titleMechanism of photochemical reactions and photophysical processes during UV curing of organosilicate films with low dielectric constant
dc.typeMeeting abstract
dc.source.peerreviewno
dc.source.conferenceInternational Conference on Modern Problems in the Physics of Surfaces and Nanostructures
dc.source.conferencedate8/06/2010
dc.source.conferencelocationYaroslavl Russia
imec.availabilityPublished - imec


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