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Channeled ion beam synthesis: a new technique to form epitaxial rare-earth silicides with high quality

dc.contributor.authorWu, Ming Fang
dc.contributor.authorVantomme, Andre
dc.contributor.authorPattyn, Hugo
dc.contributor.authorLangouche, H.
dc.contributor.authorBender, Hugo
dc.date.accessioned2021-09-29T15:55:27Z
dc.date.available2021-09-29T15:55:27Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1669
dc.sourceIIOimport
dc.titleChanneled ion beam synthesis: a new technique to form epitaxial rare-earth silicides with high quality
dc.typeOral presentation
dc.contributor.imecauthorVantomme, Andre
dc.contributor.imecauthorPattyn, Hugo
dc.contributor.imecauthorBender, Hugo
dc.source.peerreviewno
dc.source.conferenceChinese Materials Research Conference; November 17-20, 1996; Beijing, China.
dc.source.conferencelocation
imec.availabilityPublished - imec


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