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Scaling of low-k dielectrics: a bumpy road

dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorZhao, Larry
dc.contributor.authorVereecke, Bart
dc.date.accessioned2021-10-18T15:17:47Z
dc.date.available2021-10-18T15:17:47Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16701
dc.sourceIIOimport
dc.titleScaling of low-k dielectrics: a bumpy road
dc.typeMeeting abstract
dc.contributor.imecauthorVereecke, Bart
dc.source.peerreviewno
dc.source.beginpageF5.6
dc.source.conferenceMRS Spring Meeting Symp. F: Materials, Processes, Integration, and Reliability in Advanced Interconnects for Micro- and Nanoelec
dc.source.conferencedate5/04/2010
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec


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