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Design, fabrication and physical analysis of TiN/AlN deep UV photodiodes

dc.contributor.authorBarkad, H.A.
dc.contributor.authorSoltani, A.
dc.contributor.authorMattalah, M.
dc.contributor.authorGerbedoen, J.C.
dc.contributor.authorRousseau, M.
dc.contributor.authorde Jaeger, J.C.
dc.contributor.authorBenmoussa, A.
dc.contributor.authorMortet, Vincent
dc.contributor.authorHaenen, Ken
dc.contributor.authorBenbakhti, B.
dc.contributor.authorMoreau, M.
dc.contributor.authorDupuis, R.
dc.contributor.authorOugazzaden, A.
dc.date.accessioned2021-10-18T15:18:12Z
dc.date.available2021-10-18T15:18:12Z
dc.date.issued2010
dc.identifier.issn0022-3727
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16707
dc.sourceIIOimport
dc.titleDesign, fabrication and physical analysis of TiN/AlN deep UV photodiodes
dc.typeJournal article
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage465104
dc.source.journalJournal of Physics D: Applied Physics
dc.source.issue46
dc.source.volume43
imec.availabilityPublished - open access


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