Design, fabrication and physical analysis of TiN/AlN deep UV photodiodes

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Authors

Barkad, H.A.; Soltani, A.; Mattalah, M.; Gerbedoen, J.C.; Rousseau, M.; de Jaeger, J.C.; Benmoussa, A.; Mortet, Vincent; Haenen, Ken; Benbakhti, B.; Moreau, M.; Dupuis, R.; Ougazzaden, A.

ISSN

0022-3727

Issue

46

Journal

Journal of Physics D: Applied Physics

Volume

43

Title

Design, fabrication and physical analysis of TiN/AlN deep UV photodiodes

Publication type

Journal article

Embargo date

9999-12-31

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